| 摘要 |
PROBLEM TO BE SOLVED: To improve both of quality and productivity by forming a crystalline thin film layer adjacent to a recording layer just before and/or after the recording layer is formed, and forming the crystalline thin film layer consisting of elements selected from the elements which constitute the recording layer. SOLUTION: The crystalline thin film layer is selected from a GeTe film, SbTe film and GeSb film when the recording layer is a GeSbTe film. By forming the crystalline thin film layer as the base layer for the recording layer and forming the recording layer by sputtering on the crystalline thin film layer, the recording layer just after formed (as taken from a vacuum chamber) already shows a crystalline state. Or, by forming the crystalline thin film layer on the recording layer after the recording layer is formed, and then by initializing the laminated body, the recording layer with good uniformity can be easily obtd. compared with a method to initialize the recording layer. By including the aforementioned means in the production process, both of the quality and productivity can be significantly improved. |
