| 摘要 |
PROBLEM TO BE SOLVED: To establish a statistic general data for enabling utilization of WAT (wafer acceptance test) data, effectively and to explore a correlation of a defective pattern for improved productivity. SOLUTION: With one lot of wafer sample, N number of test results acquired with N-number of test item is inputted, to output a discrimination result based on one defective pattern. Here, after accepting the N-numbers of test result, the N-numbers of test result are displayed as N-dimensional test result vector, and the defective coefficient of i-th test item with the i-th component of the test result vector, and then N-dimensional test result vector is multiplied by n×n dimension conversion matrix to acquire N-dimensional defective pattern vector, while the i-th defective pattern ratio is displayed with the i-th component of defective pattern vector, resulting in a defective pattern vector as a discrimination result. |
