| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a flow control valve capable of entirely eliminating troubles such as deterioration and damage of a valve, or occurrence of dust which are caused by an increased load in an outflow side. SOLUTION: A flow control valve 10 comprises a body 11 having a chamber 20 which is formed with a inflow part 12 and a outflow part 15 via a valve seat 16 and of a valve mechanism 40 having a valve part 41 which opens and closes the valve seat 16, a first diaphragm 50 in the inflow part 12 side, and a second diaphragm 60 in the outflow part 15 side. Each of the diaphragms 50, 60 is fitted inside of the chamber 20 and divides the chamber 20 into a first pressurizing chamber 21, a valve chamber 25, and a second pressurizing chamber 30. The first diaphragm 50 and the second diaphragm 60 are normally pushed toward the valve chamber at a constant pressure by a first pressurizing means M1 and a second pressurizing means M2. The first diaphragm 50 is integrally formed with a first member 51 having the valve part 41, and the second diaphragm 60 is integrally formed with a second member 61 which is separably and loosely engaged with the first member 51.</p> |
