发明名称 THIN-FILM TRANSISTOR AND LIQUID CRYSTAL DISPLAY
摘要 <p>PROBLEM TO BE SOLVED: To provide a liquid crystal display in which manufacturing yield is improved by preventing peeling. SOLUTION: When difference in stress in the tensile direction between a gate insulating film 6 and a gate electrode 7 exceeds approximately 2×109 dyn/cm2 or more, only the gate electrode 7 tends to deform and the surrounding of the gate electrode 7 is peeled off from the gate insulating film 6. Regarding the stress in the pressing direction, a force works in the direction of pressing the peripheral edge of the gate electrode 7 on the gate insulating film 6 and adhesion is increased. When the stress difference in the pressing direction exceeds 3×109 dyn/cm2 or more, the central part in the gate electrode 7 is peeled off from the gate insulating film 6. The stress difference between the gate electrode 6 and the gate insulation film 7 is suppressed to within the range of -3×109 dyn/cm2 or +2×109 dyn/cm2 to suppress the generation ratio of defective.</p>
申请公布号 JP2000196100(A) 申请公布日期 2000.07.14
申请号 JP19980373337 申请日期 1998.12.28
申请人 TOSHIBA CORP 发明人 ISHIU TAKEHIKO
分类号 H01L21/3205;G02F1/136;G02F1/1368;H01L21/28;H01L29/786;(IPC1-7):H01L29/786;H01L21/320 主分类号 H01L21/3205
代理机构 代理人
主权项
地址