| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas analyzer having stable operation and high accuracy. SOLUTION: This equipment is equipped with a semiconductor laser 11 for emitting light having a variable wavelength, a photoacoustic cell 12 having a prescribed gas G1 enclosed in its inside for allowing the laser beam emitted from the semiconductor laser 11 to pass, a microphone 13 for picking up sound pressure inside the photoacoustic cell 12, a wavelength control part 14 for monitoring the sound pressure picked up by the microphone 13 and simultaneously for changing periodically the wavelength of the laser beam emitted from the semiconductor laser 11 with the wavelength of an absorption line by the gas G1 in the photoacoustic cell 12 as its center, a light-receiving element 15 for receiving the laser beam passing through the photoacoustic cell 12 and then passing through the atmosphere of the gas to be measured G2, and an operation part 16 for obtaining the quantity or the concentration of the gas to be measured G2, based on the output of the light-receiving element 15. |
