| 摘要 |
PURPOSE: A manufacturing method for the two panel TMA device is provided to increase the optical energy utilization and to prevent the popping phenomena from occurring at the upper part surface of the second sacrificial layer by forming a protection layer with photoresist. CONSTITUTION: A device comprises a driving substrate(210), an insulation substrate(211), a metal layer(214), a lower part protection layer(215), a MOS transistor(212), an upper part protection layer(217), an etching preventing layer(218), a first sacrificial layer(220), an actuator(230), a membrane(231), an electrodisplacive(233),and a second sacrificial layer(240). A manufacturing step comprises a step of providing the driving substrate including an insulation layer, a MOS transistor, a metal layer, a lower part protection layer, a blocking layer, an upper part protection layer and an etching preventing layer; a step of forming the first sacrificial layer in which the actuator supporting part is formed on the upper part of the driving substrate; a step of forming the second sacrificial layer on the upper part of the protection layer; and a step of forming the mirror supporting part by exposing the actuator. |
