METHOD FOR CONNECTING ACTUATOR AND INPUT LINE

摘要

PURPOSE: A method for connecting an actuator and an input line is provided to simplify an interconnection process by using an auxiliary electrode formed on an insulation film. CONSTITUTION: In a method for connecting an actuator and an input line, an insulation layer(34) is formed so as to cover a part of an upper electrode(32) and so as to be connected to a lead frame of a metal substrate(30) on which a piezoelectric film(31) and the upper electrode(32) are formed. An auxiliary electrode(35) is formed on the insulation layer(34) so as to be contacted with the upper electrode(32). The auxiliary electrode(35) formed on the insulation layer(34) is connected to an input line(33).