FABRICATION METHOD OF FERROELECTRIC CAPACITOR FOR ENHANCING INTERFACE CHARACTERISTICS

摘要

PURPOSE: A fabrication method of ferroelectric capacitor for enhancing interface characteristics is provided to reduce leakage current and prevent from detaching during following etching process. CONSTITUTION: A fabrication method of ferroelectric capacitor for enhancing interface characteristics comprises: a first step forming a first conductive film consisting lower electrodes of the capacitor; a second step a ferroelectric film on the first conductive film; a third step performing a rapid thermal annealing for generating a core of the ferroelectric film; a forth step forming a second conductive film consisting upper electrodes on the ferroelectric film; and a fifth step performing a heat treatment for growing grain size of the ferroelectric layer.