发明名称 FABRICATION OF SEMICONDUCTOR LIGHT EMITTING ELEMENT
摘要 PROBLEM TO BE SOLVED: To prevent dopant from diffusing into an active layer during fabrication of a semiconductor light emitting element. SOLUTION: A method for fabricating a semiconductor light emitting element comprises a step for forming a p-type semiconductor layer having single or a plurality of layers, a light emitting layer of AlGaInP based semiconductor material, and an n-type semiconductor layer sequentially on a nondoped GaAs substrate 10 before forming an n-type GaP thick film layer 1, and a step for removing the nondoped GaAs substrate 10. Since a transparent substrate semiconductor light emitting element is fabricated without using a p-type substrate and a thick film layer, p-type dopant is prevented from being diffused into an active layer during high temperature processing and high internal quantum efficiency is sustained resulting in a high brightness semiconductor light emitting element.
申请公布号 JP2000196139(A) 申请公布日期 2000.07.14
申请号 JP19980368709 申请日期 1998.12.25
申请人 SHARP CORP 发明人 KURAHASHI TAKANAO;HOSOBANE HIROYUKI
分类号 H01L33/14;H01L33/30;H01L33/40;H01S5/00;H01S5/323 主分类号 H01L33/14
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