| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a technology that can arrange chips automatically and appropriately. SOLUTION: A virtual wafer 10 and a mask 19 are moved relatively, after an orientation flat 12 is overlapped on a scribe line 16x in an X-direction and the number of non-defective products is counted, and a result corresponding to the quantity of relative movement is stored every time, when the number of non-defective products varies. Thus, the relation between the quantity of relative movement and the number of non-defective products can be recognized, so that chips can be arranged in such a position, where the largest number of non-defective products is obtained or the number thereof is stabilized.</p> |
