发明名称 PROBE DEVICE
摘要 PROBLEM TO BE SOLVED: To secure a proper contact pressure, even if a circuit terminal interval becomes small by supporting contact pieces with an actuator, and elastically supporting contact sections to be kept in contact with the circuit terminals of a test circuit with a deformation section at the desired contact pressure. SOLUTION: Thin contact pieces 1 are supported by an actuator made of a high-pressure chamber 7 and a diaphragm 8, and contact sections 2 to be kept in contact with an electric conduction section 12 of a test circuit are elastically supported by a deformation section 3 at the desired contact pressure. High- pressure air is fed from an air feed port 9 and is filled in the high-pressure chamber 7, air pressure is applied to the air action sections of the thin contact pieces 1 via the diaphragm 8 applied with the air pressure, and depressing force is applied to their tip sections. The thin contact pieces 1 are regulated by a support plate 11 in 'no-test state'. When the electric conduction section 12 is moved upward in contact with the contact sections 2, the tip portions are lifted nearly vertically than the deformation section 3 with the air pressure kept applied. The high-pressure chamber 7 has the function of an air reservoir, thus the contact pressure is not changed in the lift process, and the proper contact pressure is maintained.
申请公布号 JP2000193681(A) 申请公布日期 2000.07.14
申请号 JP19980374628 申请日期 1998.12.28
申请人 KIMOTO ISAO 发明人 KIMOTO ISAO
分类号 G01R1/06;G01R1/073;G01R31/28;H01L21/66;(IPC1-7):G01R1/06 主分类号 G01R1/06
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