| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a holder which can shift a semiconductor wafer, without making contact with a processing face in least at shifting of a semiconductor wafer for the grinding and polishing processing of the semiconductor wafer, where mirror and plane processing of superhigh precession is required. SOLUTION: This holder is equipped with a support lever 1 which supports a semiconductor wafer W, a pair of tip clamps 2 which are provided at the support lever, a clamp support 3 which is stacked on the support lever, and a pair of base clamps 4 which are provided at the clamp supports 3. For a pair of tip clamps 2 and a pair of base clamps 4, grooves for holding the periphery of a semiconductor wafer are made around the barrels, and also this holder is provided with a sliding means 5, which slides the supporting lever and the clamp support back and forth.</p> |
