| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve analytical precision by enabling to use both a measurement intensity of an X-ray fluorescence by means of a wavelength dispersive type detection means and a measurement intensity of an X-ray fluorescence by means of an energy dispersive type detection means by comparing them as they are, only by multiplying them with a sensitivity independent of the individual samples, characteristic of each detection system and obtained beforehand, and also to fully obtain the sensitivity of the energy dispersive type detection means. SOLUTION: In this X-ray fluorescence analytical device, the part to be measured 1a of a sample 1 is irradiated with primary X-ray 3, and an X-ray fluorescence 5 generated from the part to be measured 1a is detected by a detection means, to thereby execute analysis. As the detection means, a wavelength dispersive type detection means 6 having a spectroscope 8 and a first detector 9 and an energy dispersive type detection means 11 which has an energy dispersive type second detector 12 are installed. An angleθ1, formed by the path 81 of a first X-ray fluorescence between the part to be measured 1a of the sample 1 and the spectroscope 8 and by the surface of the sample 1, is equalized with an angleθ2 formed by a path 82 of second X-ray fluorescence between the part to be measured 1a of the sample 1 and the energy dispersive type detector 12 and by the surface of the sample 1, and the path 82 of the second X-ray fluorescence is set shorter than the path 81 of the first X-ray fluorescence.</p> |
