| 摘要 |
<p>PROBLEM TO BE SOLVED: To ensure easy manufacture of an electric field emission type cathode using material, such as carbon material, capable of emitting electrons in an electric field of a low threshold. SOLUTION: This manufacture includes a process for forming an insulating layer 7 and a second electrode 12 thereon on a first electrode 11, both having an opening 25 in parts for forming an electron emitting element, a process for forming a resist layer 26 on an area including on a second electrode 12 except for the opening 25 and forming an electron emitting material layer 27 (such as a carbon material layer) on an area including the resist layer 26 and in the opening 25 facing to the first electrode 11, a process for forming an electron emitting element 28 of an electron emitting material layer on the first electrode 11 in the opening 25 by lifting off the resist layer 26 and the electron emitting layer 27 thereon, and a process for etching and eliminating an insulating layer wall in the opening 25 so as to separate the insulating layer wall from the electron emitting element 28.</p> |
