| 摘要 |
PROBLEM TO BE SOLVED: To provide a reliable force sensor that can three-dimensionally measure the direction and size of physical quantity that operates externally and prevent a damage and crack due to shock force or large external force being applied abruptly without reducing the detection sensitivity. SOLUTION: The force sensor 1 is provided with a support 3 with a hollow part 4 and at least one detection element 6, and is composed of a flexible plate 5A being suspended horizontally at the hollow part 4 of the support 3 and an operation body 2 that is hangingly supported by a flexible plate 5A in the hollow part 4 of the support 3. The strength of the flexible plate 5A is increased gradiently from an arbitrary position such as a central part C between the outer periphery of the operation body 2 and the inner periphery of the support 3 toward the outer periphery of the operation body 2 and/or toward the inner periphery of the support 3.
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