| 摘要 |
PROBLEM TO BE SOLVED: To provide a projection aligner which is well corrected for chromatic aberration against such short-wavelength light as the F2 laser light, etc., with a small number of lenses. SOLUTION: A lighting optical system 3 is constituted to supply illuminating light having a central wavelength of <=180 nm and a full width at half maximum of <=20 pm. A projection optical system 7 contains a lens component and a concave reflecting mirror which are positioned to substantially correct the chromatic aberration of the optical system 7 against illuminating light. |
