| 摘要 |
PROBLEM TO BE SOLVED: To provide a resist coater capable of being manufactured small, space saving, and at low cost for applying resist on a substrate such as color filter and the like. SOLUTION: A resist coater is capable of applying a plurality of resists on a wafer. The coater comprises a plurality of resist discharging nozzles 56a to 56d capable of dropping different resist liquid respectively, a plurality of resist liquid supplying systems 57a to 57d for supplying resist to each resist discharging nozzles 56a to 56d respectively, a plurality of washing mechanisms 110a to 110d for individually washing a plurality of resist discharging nozzles 56a to 56d, an operator panel 90 for inputting signals selectively operating a plurality of washing mechanisms 110a to 110d, and a control mechanism 110 for controlling the washing mechanisms 110a to 110d based on the signal from the operating panel 90. |
