发明名称 DEVICE AND METHOD FOR ADJUSTING FOCUS, AND DEVICE AND METHOD FOR INSPECTING DEFECTS
摘要 PROBLEM TO BE SOLVED: To provide a focus method and a device capable of obtaining the stable focusing accuracy irrespective of a worker, and controlling the focusing accuracy as the quantitative value. SOLUTION: In a focusing device having an image sensor 5, an image pick-up object holding part, an image formation lens 4, a focal point level calculation part 7b, a test chart with a test pattern thereon, and a focusing mechanism 6, the focal point level calculation part 7b converts the image signal into the binary signal to be formed of the high level and low level using the first and thresholds, calculates the first total value by totaling the number of picture elements in the section of either high level or low level of the binary signal converted using the first threshold, calculates the second total value by totaling the number of picture elements in the section of either high level or low level of the binary signal converted using the second threshold, and calculates the difference between the first and second total values.
申请公布号 JP2000193880(A) 申请公布日期 2000.07.14
申请号 JP19980371662 申请日期 1998.12.25
申请人 MITSUBISHI RAYON CO LTD 发明人 TASHIRO SHINTARO;IKEDA TOKUYUKI;TANAKA KUNIYASU
分类号 G03B13/36;G02B7/28;G02B7/36;(IPC1-7):G02B7/28 主分类号 G03B13/36
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