METHOD AND APPARATUS FOR SEPARATING CHIP ON DICING SHEET

摘要

PROBLEM TO BE SOLVED: To provide a method and apparatus which can peel off a chip from a dicing sheet in satisfactory peeled conditions and can stably pick up the chip from the dicing sheet. SOLUTION: This apparatus includes a sheet-holding mechanism for holding a dicing sheet 21 having a chip 3 bonded thereto under tensioned condition, a suction stage 2 provided therein with a plurality of grooves 2a to be vacuum chucked corresponding in dimensions to the chip 3, and a vacuum chucking mechanism for vacuum chucking the sheet 21 onto the stage 2, when the chip 3 is separated from the sheet 21. The apparatus functions to separate the chip 3 from the sheet 21 so as to pick it up by vacuum chucking of the sheet 21 onto the stage 2.