ELEMENT MAPPING DEVICE, SCANNING TRANSMISSION ELECTRON MICROSCOPE, AND ELEMENT MAPPING METHOD

摘要

An element mapping device for easily forming an element mapping image. An electron beam transmitted through an analysis object (5) placed in a scanning transmission electron microscope strikes an element mapping device. The electron energy loss spectrum of the electron beam is produced by an electron spectroscope (11). Acceleration voltage data about elements and window information used by the two-window method is stored in a database (24). Even if the element to be analyzed is changed, the two-dimensional element distribution image can be readily ascertained. The electron beam entering the spectroscope passes through an object point (10), and hence the aberration is small and the energy stability is excellent. Therefore, the drift of the energy loss spectrum is small and thereby an element distribution of high accuracy can be obtained.