| 摘要 |
<p>The instant invention is a dynamic piezoelectric touch probe for use with coordinate measurement machines. The touch probe is characterized by five subsystems; piezoelectric vibrator (11, 12) controlled by a self-tuning drive circuit (14) that adjusts operating frequency and amplitude, a high sensitivity, resonant accelerometer unit (7) coupled to the piezoelectric vibrator (11, 12) a flexible suspension/stylus (10, 9) with transverse resonant frequencies tuned to the operating frequency band of the piezoelectric vibrator (11, 12), a digital control circuit that automatically sweeps the operating band of the piezoelectric vibrator to (a) detect the resonant frequency of the stylus/suspension (9, 10), (b) set the drive signal frequency at the resonance of the stylus/suspension and (c) control the drive signal amplitude, and a triaxial load cell system (8) that is useful for detecting excessive low frequency suspension/stylus vibration, and excessive impact force during a touch event.</p> |
