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发明名称
Verfahren zur Herstellung Silizium-Einkristalle durch das kontinuierlichen Czochralski-Verfahren
摘要
申请公布号
DE69702219(D1)
申请公布日期
2000.07.13
申请号
DE19976002219
申请日期
1997.02.24
申请人
SHIN-ETSU HANDOTAI CO., LTD.
发明人
NAGAI, NAOKI;HARADA, ISAMU;ODA, MICHIAKI
分类号
C30B15/02;C30B15/22;C30B29/06;(IPC1-7):C30B15/02
主分类号
C30B15/02
代理机构
代理人
主权项
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