| 摘要 |
PROBLEM TO BE SOLVED: To reduce corrosion and wear in the vicinities of gas inlet vents, which are exposed most to a halogen gas and are formed in the sidewalls of the drum part of a reaction treatment container, so as to suppress generation of particles by a method, wherein the vicinities of the gas inlet vents are formed of a carbide ceramics, having specified volume intrinsic resistivity. SOLUTION: This reactive treatment container consists of a bottomed cylindrical bottom part 1c, consisting of aluminum subjected to anodizing, a drum part 1b which is a cylindrical body having gas inlet vents 7 in its sidewalls and consists of a carbide ceramics having a volume intrinsic resistivity lower than 105 Ωcm, and a bottomed cylindrical cover part 1a consisting of aluminum subjected to anodizing. Halogen gas 8 is introduced in the container 1 through the vents 7 formed in the sidewalls of the drum part 1b of the container 1, and high-frequency power is applied between upper and lower electrodes 2 and 3 to generate a plasma. Furthermore, the vicinities of the vents 7 are formed of the carbide ceramics having the volume intrinsic resistivity of 105 Ωcm or smaller. |
