| 摘要 |
<p>A substrate transport apparatus B having a drive section (24), two independently movable arm assemblies (66, 68) connected to the drive section on a common axis of rotation D, and substrate holders (38, 39) connected to the arm assemblies. The drive section includes three coaxial drive shafts (50a, 50b, 50c) with a pulley connected to one of the shafts. The arm assemblies are connected to respective ones of the two other shafts.</p> |
