METODE FLOROMETRI UNTUK MENINGKATKAN EFISIENSI PROSES PEMBILASAN DAN PROSES PEROLEHAN-KEMBALI AIR PADA PEMBUATAN CHIP SEMIKONDUKTOR

摘要

A method for determining wafer cleanliness by fluorometric monitoring of the impurities in the semiconductor chip wafer rinse solution. A clean chip is indicated by a leveling off of increased concentration of impurities as the rinsing of the chip progresses. A method for optimizing reuse or recyling of the water discharged from the rinse process which accurately measures the contaminants in that water.