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发明名称
TRENCH ISOLATION
摘要
申请公布号
EP1018155(A1)
申请公布日期
2000.07.12
申请号
EP19980912848
申请日期
1998.03.20
申请人
TELEFONAKTIEBOLAGET L M ERICSSON (PUBL)
发明人
SOEDERBAERG, ANDERS, KARL, SIVERT;OEGREN, NILS, OLA;SJOEDIN, ERNST, HAKAN;ZACKRISSON, OLOF, MIKAEL
分类号
H01L21/76;H01L21/763;(IPC1-7):H01L21/76;H01L29/06
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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