Apparatus and method for automatically controlling semiconductor manufacturing process in semiconductor factory automation system

摘要

The device includes several processing systems connected to a common communication line. System controllers are provided for each process system. Several test systems are provided for testing the batch being processed to create batch process data. Several test system controllers receive the batch process data. A memory stores the batch process data. The batch process data are compared with batch specification data. If the difference exceeds a given range, a message is generated indicating an abnormal batch. A transaction is produced in response to the message, and indicates an abnormal batch has been manufactured, halting the next batch process. An independent claim is included for a method of automatically controlling a semiconductor manufacturing process.