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经营范围
发明名称
Oscillatory chuck method and apparatus for coating flat substrates
摘要
申请公布号
EP0653683(B1)
申请公布日期
2000.07.12
申请号
EP19940308292
申请日期
1994.11.10
申请人
SEMICONDUCTOR SYSTEMS, INC.
发明人
PARODI, MICHAEL L.;HURTIG, ROY E.
分类号
H01L21/00;B05D1/00;B05D1/40;G03F7/16;H01L21/027;(IPC1-7):G03F7/16
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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