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摘要
申请公布号
JP3063128(B2)
申请公布日期
2000.07.12
申请号
JP19900232941
申请日期
1990.09.03
申请人
发明人
分类号
H01L29/78;H01L27/04;(IPC1-7):H01L29/78
主分类号
H01L29/78
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