发明名称 |
NEAR-FIELD RESISTIVITY MICROSCOPE |
摘要 |
<p>A microwave microscope comprising a microwave waveguide having a probe end positioned closely above the surface to be probed such that the surface is in the near field of the microwave radiation. The end of the probe facing the surface is covered with a metallic foil or a conducting film deposited over a dielectric layer and having a rectangular slit formed therein. The long dimension of the slit is nearly resonant with the microwave, that is, just slightly longer than one-half the microwave wavelength. The short dimension is substantially shorter than long dimension and is chosen such that the slitted end is transparent to the microwave. Thereby, substantial microwave power is emitted through the slit with fine resolution that is determined by the short dimension of the slit. The probe is scanned across the surface in the direction of the short slit dimension, and its resolution is approximately equal to the short slit dimension. Preferably, the end is convexly curved along the direction of the long slit dimension so that only a portion of the slit is in the near field, thereby reducing the effective lateral dimension.</p> |
申请公布号 |
EP0850419(B1) |
申请公布日期 |
2000.07.12 |
申请号 |
EP19960929509 |
申请日期 |
1996.09.10 |
申请人 |
YISSUM RESEARCH DEVELOPMENT COMPANY OF THE HEBREW UNIVERSITY OF JERUSALEM |
发明人 |
DAVIDOV, DAN;GOLOSOVSKY, MICHAEL |
分类号 |
G01N22/00;G01R1/067;G01R27/02;(IPC1-7):G01R27/26 |
主分类号 |
G01N22/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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