PROCESS FOR FABRICATING LAYERED SUPERLATTICE MATERIALS AND MAKING ELECTRONIC DEVICES INCLUDING SAME WITHOUT EXPOSURE TO OXYGEN,申请号EP19980934436-传众专利搜索

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发明名称	PROCESS FOR FABRICATING LAYERED SUPERLATTICE MATERIALS AND MAKING ELECTRONIC DEVICES INCLUDING SAME WITHOUT EXPOSURE TO OXYGEN
摘要
申请公布号	EP1018151(A1)	申请公布日期	2000.07.12
申请号	EP19980934436	申请日期	1998.07.17
申请人	SYMETRIX CORPORATION;SIEMENS AKTIENGESELLSCHAFT	发明人	SCHINDLER, GUNTHER;HARTNER, WALTER;MAZURE, CARLOS;SOLAYAPPAN, NARAYAN;JOSHI, VIKRAM;DERBENWICK, GARY, F.
分类号	C23C18/12;H01L21/314;H01L21/316;(IPC1-7):H01L21/316	主分类号	C23C18/12
代理机构		代理人
主权项
地址

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