Angular velocity sensor

摘要

An angular velocity sensor includes a support body (1), a plurality of beams (2; 3; 4; 5) individually supported by the support body (1), and a coupling part (6) with which a plurality of the beams (2-5) are commonly coupled, and a vibrating weight (6a) formed on the coupling part (6), wherein each beam (2-5) comprises a wide beam part (2a-5a) and a narrow beam part (2b-5b) narrower than the wide beam part (2a-5a). <IMAGE> <IMAGE>