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发明名称
Glow discharge controlling circuit
摘要
申请公布号
EP0782171(B1)
申请公布日期
2000.07.12
申请号
EP19960118984
申请日期
1996.11.27
申请人
STRAEMKE, SIEGFRIED, DR.
发明人
STRAEMKE, SIEGFRIED, DR.
分类号
C23C8/36;H01J37/32;(IPC1-7):H01J37/32
主分类号
C23C8/36
代理机构
代理人
主权项
地址
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