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发明名称
摘要
申请公布号
JP3063832(B2)
申请公布日期
2000.07.12
申请号
JP19970226649
申请日期
1997.08.22
申请人
发明人
分类号
H01L21/76;H01L21/8249;H01L27/06;(IPC1-7):H01L21/824
主分类号
H01L21/76
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