| 摘要 |
PROBLEM TO BE SOLVED: To make formable a high quality coating film by preventing the generation of dust caused by the friction of the joining surface between a rotary cup and a cup cover by minimizing the friction. SOLUTION: The coater is equipped with a rotary cup 1 for housing a material 5 to be treated, a disk-shaped cup cover 2 for covering the opening of the cup 1, a packing means 4 arranged partially in the joining area of the cup 1 and the cover 2, and a rotation driving means which rotates the cup 1 and the cover 2 synchronously at a high speed. The packing means 4, when the cup 1 and the cover 2 are rotated synchronously at a high speed, can displace the cover 2 in an optical direction to the opening edge of the cup 1.
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