| 摘要 |
PROBLEM TO BE SOLVED: To provide a film forming mask device which is easy in assembly of the film forming mask device, accurate in positioning a mask, free from any defective insulation and defective disconnection caused by mask deviation, and excellent in workability and reliability. SOLUTION: In a film forming mask device, a storage recessed part 12 to store a plurality of film forming bodies B is formed, a lower mask pattern 11 for film forming is formed in a bottom surface of the storage recessed part, and a lower mask 1 having a spacer integrated with a mask, and an upper mask 2 which is closely attached to an upper surface of the lower mask and has upper mask patterns 21, are provided. The upper mask is provided with projecting parts 22, 23 to press the film forming body against the bottom surface of the storage recessed part at the position corresponding to the forming position of the storage recessed part of the lower mask.
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