发明名称 Method and apparatus for applying a substance to a surface
摘要 A method and an apparatus apply a substance, especially a developer, to a surface through jets. Each jet carries the substance to be applied to a predetermined portion of the surface, and each jet essentially applies a predetermined quantity of substance per unit of surface area, wherein at least one jet applies a maximum quantity of substance per unit of surface area to the surface. The quantity of substance per unit of surface area applied by each jet is selected in such a way that it is greater than 1% of the maximum quantity of substance per unit of surface area.
申请公布号 US6086269(A) 申请公布日期 2000.07.11
申请号 US19980073177 申请日期 1998.05.05
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 BRADL, STEPHAN;HIETSCHOLD, ELKE
分类号 B05D1/02;G03F7/16;G03F7/30;H01L21/00;(IPC1-7):G03D5/04;B08B3/02 主分类号 B05D1/02
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