发明名称 |
Method and apparatus for applying a substance to a surface |
摘要 |
A method and an apparatus apply a substance, especially a developer, to a surface through jets. Each jet carries the substance to be applied to a predetermined portion of the surface, and each jet essentially applies a predetermined quantity of substance per unit of surface area, wherein at least one jet applies a maximum quantity of substance per unit of surface area to the surface. The quantity of substance per unit of surface area applied by each jet is selected in such a way that it is greater than 1% of the maximum quantity of substance per unit of surface area.
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申请公布号 |
US6086269(A) |
申请公布日期 |
2000.07.11 |
申请号 |
US19980073177 |
申请日期 |
1998.05.05 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
BRADL, STEPHAN;HIETSCHOLD, ELKE |
分类号 |
B05D1/02;G03F7/16;G03F7/30;H01L21/00;(IPC1-7):G03D5/04;B08B3/02 |
主分类号 |
B05D1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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