发明名称 |
X-ray imaging array detector and laser micro-milling method for fabricating array |
摘要 |
An x-ray focal plane array (XFPA) detector is fabricated by a laser micro-milling method under strict process control conditions. The detector has an array of phosphor pixels bonded together with a light reflective adhesive filling the grooves between adjacent pixels. The phosphor array is bonded on top of a visible detector array, either directly or via a light guiding structure, such that each phosphor pixel is aligned with a corresponding visible detector pixel. The phosphor array is fabricated by moving a phosphor substrate relative to a laser beam of predetermined intensity at a controlled, constant velocity along a predetermined path defining a set of grooves between adjacent pixels so that a predetermined laser flux per unit area is applied to the phosphor material, and repeating the movement for a plurality of passes of the laser beam until the grooves are ablated to a desired depth.
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申请公布号 |
US6087618(A) |
申请公布日期 |
2000.07.11 |
申请号 |
US19990275537 |
申请日期 |
1999.03.24 |
申请人 |
WIENER-AVNEAR, ELIEZER |
发明人 |
WIENER-AVNEAR, ELIEZER;MCFALL, JAMES EARL |
分类号 |
B23K26/00;G01T1/20;(IPC1-7):B23K26/00 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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