| 摘要 |
PROBLEM TO BE SOLVED: To improve polishing performance, and to intend long period stability and improvement in productivity. SOLUTION: By backing up a polishing pad 9 by a plane surface 19c formed by a nondeforming part 19b which is provided at the swelling part 19a of a backup member 19, and not deformed by the above fluid pressure, and polishing by squeezing it to a work 1, and by squeezing the polishing surface 9a of the polishing pad 9, and a dressing member 41, in the condition holding the backup member 19 to back up by holding the polishing pad 9 to the surface, sucked and supported to a receiver member at the rear part, by sucking from the inner side of a polisher 18, the polishing surface 9a is groud. |
