CONTINUOUS THIN FILM COATER

摘要

PROBLEM TO BE SOLVED: To make it possible to form a constant film thickness with high accuracy among lots and also within lots. SOLUTION: A paying-out part 10 pays out rolled-up PET film. A coating part 20 coats the paid-out film with a poly silazane solution. A drying and reaction vessel 30 drys the applied poly silazane solution and forms a silica layer by converting into ceramic by a chemical reaction. A reeling part 40 winds the film forming the silica layer on its surface in a roll shape. An LD detector 50 measures light transmittance of the film coated with the silica layer. A controller 60 controls the rotational speed of a driving motor 11 and a driving motor 41 so that the light transmittance measured by the LD detector 50 may be a desired value.