| 摘要 |
PROBLEM TO BE SOLVED: To improve the product acceptance percentage by preventing the generation of liquid scattering and reducing a washing residue. SOLUTION: A support member 25 is fitted to one opening of a cylindrical substrate 21 to close the substrate 21, the substrate 21 is immersed in a coating liquid 23 from the end part side of the other opening of the substrate 21. When the substrate 21 is removed from the liquid 23, immediately before the end part of the other opening of the substrate 21 being removed from the surface of the liquid 23, at a prescribed pressurization position apart from the ends part of the other opening of the substrate 21, the inside of the substrate 21 is pressurized by a prescribed pressurization force.
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