发明名称 Adhesion of silicon oxide to diamond
摘要 An article includes a diamond substrate which is securely adhered to a robust layer of silica layer that cannot be scratched by a tungsten probe or delaminated from the diamond substrate by pulling on a gold wire secured to the silica layer. This aricle can be made by electrochemically cleaning the diamond substrate to remove non-diamond carbon adhering thereto, depositing a fragile layer of silica layer which weakly bonds to the cleaned diamond, and annealing the fragile silica layer to convert it into a strongly bonded and robust silicon dioxide layer. The article is particularly useful in electronics, and has a low leakage current and low responsiveness to visible light.
申请公布号 US6087005(A) 申请公布日期 2000.07.11
申请号 US19930140388 申请日期 1993.10.22
申请人 THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY 发明人 MARCHYWKA, MICHAEL J.
分类号 H01L21/04;(IPC1-7):H01L29/66 主分类号 H01L21/04
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