| 摘要 |
PROBLEM TO BE SOLVED: To reduce an amount of a piezoelectric body to be etched thereby decreasing the deterioration of an etching solution and being economical, lessen a loading effect, improve a reproducibility of processes and a uniformity in etching, enhance a rigidity of a total structure, reduce a diaphragm vibration by the piezoelectric body remaining between space parts and restrict a contact between chambers. SOLUTION: The ink jet printer head includes a substrate 70, space parts 71 integrally formed with the substrate 70 to the substrate and having only lower parts opened, first piezoelectric bodies 77 formed on a substrate part above the space parts which are actuated when a voltage is impressed thereto, second piezoelectric bodies 79 which are formed on the substrate part other than above the space parts in a form with only the piezoelectric body of a part symmetric to an outline form of the space part being removed and which are not actuated even when a voltage is impressed thereto, and upper electrodes 78 formed to upper parts of the first piezoelectric bodies 78. The second piezoelectric bodies 79 enhance a rigidity of a total structure and reduces a diaphragm vibration. |
