| 摘要 |
PROBLEM TO BE SOLVED: To inexpensively prevent pollution of a clean space by forming small circular holes for communicating both surfaces in a part covered with an elastic material, and mutually joining parts for covering both surfaces of an outside diameter side part of a metallic plate through the small circular holes. SOLUTION: An elastic material 15 is composed of an elastic engaging part 17 projecting to the diametrical directional outside and the inside surface side more than the outer peripheral edge of a metallic plate 14, cover parts 18a, 18b for covering both side surfaces of an outside diameter side half part of the metallic plate 14 and a large number of connecting parts 19, 19 for connecting the mutual these both cover parts 18a, 18b by existing in respective small circular holes 16, 16. In the elastic material 15, since the metallic plate 14 is formed by injection molding, the respective parts 17, 18a, 18b, 19 are integrally formed. In sealing plates 6, 6, a part of this elastic material 15 enters the small circular holes 16, 16 to form a large number of connecting parts 19, 19, and the metallic plate 14 is sandwiched by a pair of joined/fixed cover parts 18a, 18b. Thus, the elastic material 15 and the metallic plate 14 are mutually integrally joined, and since there is no need to use an adhesive, pollution of a clean space can be prevented.
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