发明名称 |
Method for repairing surface defects |
摘要 |
A method for repairing defects in a surface layer of a substrate. The method comprises the redeposition, in a solvent environment, of a fill material into the defects of the surface layer. The fill material is provided by the surface layer itself or from a separate source comprising a different material from that of the surface layer.
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申请公布号 |
US6087191(A) |
申请公布日期 |
2000.07.11 |
申请号 |
US19980012142 |
申请日期 |
1998.01.22 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BOGGS, KARL E. |
分类号 |
H01L21/3105;H01L21/321;(IPC1-7):B24B1/00 |
主分类号 |
H01L21/3105 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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