发明名称 Method for repairing surface defects
摘要 A method for repairing defects in a surface layer of a substrate. The method comprises the redeposition, in a solvent environment, of a fill material into the defects of the surface layer. The fill material is provided by the surface layer itself or from a separate source comprising a different material from that of the surface layer.
申请公布号 US6087191(A) 申请公布日期 2000.07.11
申请号 US19980012142 申请日期 1998.01.22
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BOGGS, KARL E.
分类号 H01L21/3105;H01L21/321;(IPC1-7):B24B1/00 主分类号 H01L21/3105
代理机构 代理人
主权项
地址