Inspection system for micromechanical devices

摘要

A visual inspection system (10) and method for inspecting the operation of micromechanical devices. The system has a vision system (16), a vision system controller (18), a system controller (20), an illumination system (12), a digital signal processor and a mounting stage (22). The objects undergoing inspection, either wafers or devices, are mounted under the visions system. A probe card is engaged to the object and power is provided. The vision system (16) records which elements or devices on the object begin operating at that voltage. The voltage is then incremented and the process continues until a determination is made as to the objects operability. The system can also be adapted to inspect micromechanical spatial light modulators by generating images with the modulator and capturing them with the image system. The digital signal processor then analyzes the images while the vision system moves to the next object to be inspected.