发明名称 |
Control vent system for ultra-high purity delivery system for liquefied compressed gases |
摘要 |
A control vent system is disclosed for reducing volatile impurities in a gaseous product of ultra-high purity delivered from a storage vessel containing an inventory of a non-cryogenic liquid product, as well as a method and a system for delivering the product from the storage vessel. The control vent system includes a vent line attached to the storage vessel and a condenser in the vent line. Coolant (e.g., a refrigerant) is transferred between the condenser and a source of coolant, such as a refrigeration unit. The method of reducing volatile impurities includes three steps. The first step is to vent part of the gaseous vapor from the gaseous vapor space to a condenser. The second step is to cool the vented gaseous vapor in the condenser to a temperature below the boiling point of the liquid product and above the boiling points of the volatile impurities. As a result, a first portion of the vented gaseous vapor is condensed and a second portion of the vented gaseous vapor is not condensed. The final step is to vent the second portion of the vented gaseous vapor from the condenser.
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申请公布号 |
US6085548(A) |
申请公布日期 |
2000.07.11 |
申请号 |
US19980138489 |
申请日期 |
1998.08.24 |
申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
CHOWDHURY, NASER MAHMUD;IRVEN, JOHN;ZHENG, DAO-HONG;CHANDRA, SUKLA;COULL, KENNETH;TAEGE, REINER REINHARD WILHELM |
分类号 |
F17C6/00;B01D5/00;B01D19/00;C23C16/44;F17C7/04;F17C9/02;F17C13/02;F17C13/04;H01L21/205;(IPC1-7):F25J1/00 |
主分类号 |
F17C6/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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