发明名称 Control vent system for ultra-high purity delivery system for liquefied compressed gases
摘要 A control vent system is disclosed for reducing volatile impurities in a gaseous product of ultra-high purity delivered from a storage vessel containing an inventory of a non-cryogenic liquid product, as well as a method and a system for delivering the product from the storage vessel. The control vent system includes a vent line attached to the storage vessel and a condenser in the vent line. Coolant (e.g., a refrigerant) is transferred between the condenser and a source of coolant, such as a refrigeration unit. The method of reducing volatile impurities includes three steps. The first step is to vent part of the gaseous vapor from the gaseous vapor space to a condenser. The second step is to cool the vented gaseous vapor in the condenser to a temperature below the boiling point of the liquid product and above the boiling points of the volatile impurities. As a result, a first portion of the vented gaseous vapor is condensed and a second portion of the vented gaseous vapor is not condensed. The final step is to vent the second portion of the vented gaseous vapor from the condenser.
申请公布号 US6085548(A) 申请公布日期 2000.07.11
申请号 US19980138489 申请日期 1998.08.24
申请人 AIR PRODUCTS AND CHEMICALS, INC. 发明人 CHOWDHURY, NASER MAHMUD;IRVEN, JOHN;ZHENG, DAO-HONG;CHANDRA, SUKLA;COULL, KENNETH;TAEGE, REINER REINHARD WILHELM
分类号 F17C6/00;B01D5/00;B01D19/00;C23C16/44;F17C7/04;F17C9/02;F17C13/02;F17C13/04;H01L21/205;(IPC1-7):F25J1/00 主分类号 F17C6/00
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