| 摘要 |
<p>A pressure sensor comprises a diaphragm (6) with a first surface that receives pressure, and a thermal detector (3) having a heat-sensitive resistor opposed to the diaphragm with a spacer between. Since the quantity of displacement of the diaphragm due to the change in pressure is detected as the change in the state of heat equilibrium in the thermal detector, the diaphragm surface that receives pressure directly from the fluid for measurement does not require any treatment, such as filming and photochemical treatments. Therefore, main parts of the thermal pressure detector can be made in great quantities on a silicon wafer in a simple manufacturing process. This provides low-cost pressure sensors while improving the accuracy and reliability of thermal pressure detector elements.</p> |
