| 摘要 |
<p>In a method of manufacturing an optical waveguide, a lower clad layer (6) is formed, by using CVD, on a substrate 1. The lower clad layer is made of a quartz material. A core formation layer (7) is formed, by CVD, on the lower clad layer. The core formation layer is made of a quartz material. At least two cores (8) are formed as channels by patterning the core formation layer. An upper clad layer (9) is formed, by CVD in which one or more organic materials are used as a source/sources, on the cores and the lower clad layer. The upper clad layer is made of a quartz material which includes at least one of phosphors, boron, and germanium as a dopant. The sources include an identical alkoxyl radical. <IMAGE></p> |
