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发明名称
Herstellung einer Vorrichtung unter Verwendung von Röntgenstrahlen eines Plasmas zur Erzeugung eines Musters
摘要
申请公布号
DE69421447(T2)
申请公布日期
2000.07.06
申请号
DE19946021447T
申请日期
1994.05.11
申请人
AT & T CORP., NEW YORK
发明人
WHITE, DONALD LAWRENCE
分类号
G03F7/20;G21K1/06;H01L21/027;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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